Abstract
J. Kouvetakis
Department of Chemistry, and Center for Solid State Science, Arizona
State University, Tempe AZ, 85287
Alloys and compound in the C-Si-Ge-Sn system
A summary of recent work on synthesis of semiconductor alloys and
compounds in the C-Si-Ge system involving epitaxial heterostructures and
nanostructures which are intended for Si-based bandgap engineering and
lattice matching will be presented. These materials are created
heteroepitaxially on Si and include diamond cubic alloys and strain
stabilized ordered phases in the C-Si-Ge-Sn system. Examples of new
compound semiconductors include the Si4C,Ge4C,and
(Si2Ge)Cx compositions
with diamond-cubic structures and the Si3GeC4
phase with a sphalerite-like structure. Random alloy systems include
silicon-germanium-carbon solid solutions, monocrystalline and
nanostructured (quantum dots and wires) Ge1-xCx hybrids of Ge and
diamond and related Si1-xCx materials. Current work aimed
towards synthesis of new ternary Si-Sn-C and Ge-Sn highly metastable
phases will be highlighted. Perfectly epitaxial diamond-cubic Ge-Sn
materials are created on Si (100) and exhibit unprecedented thermal
stabilities superior crystallinities and unique crsyallographic and
optical properties such as adjustable badngaps and lattice constants.
The optical, vibrational and structural properties of these materials
will be discussed. The presentation emphasizes an approach that combines
novel precursor chemistries and modern deposition techniques (ultrahigh
vacuum chemical vapor deposition) to develop thin films of new inorganic
materials.
Development of group III nitrides and quaternary compounds in the
SiCALN system
Growth and optical properties of epitaxial nitrides and related carbide
nitride hybrids via novel chemical routes is presented. The first part
of the presentation is focused on growth and characterization of GaN
heterostructures and nanostructures on Si via low-temperature MBE/CVD
methods utilizing new families of single source inorganic precursors of
composition H2GaN3, D2GaN3
and H(Cl)GaN3. This approach represents one of the simplest
possible and most versatile synthetic routes to GaN.
The second part deals with epitaxial growth of metastable SiCAlN solid
solutions on SiC and Si via reactions between a unimolecular source SiH3CN and Al atoms. High hardness single phase SiCAlN that
luminescences at 3.2 eV and displays an ordered hexagonal 2H/2H and
4H/2H structure is grown on 6H SiC at 750 °C. Commensurate
heteroepitaxy of SiCAlN on Si (111) is facilitated by in situ formation
of crysstalline oxide interfaces based on the Al-Si-O-N system.
Integration of widebandgap semiconductors with Si is readily achieved by
this method.
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